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Gate Stacks with High-k Dielectrics and Metal Electrodes. Fermi Level Pinning and Dipoles Induced by Lanthanide Oxides

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Аннотация к книге "Gate Stacks with High-k Dielectrics and Metal Electrodes. Fermi Level Pinning and Dipoles Induced by Lanthanide Oxides"

Continuing to scale down the transistor size makes the adoption of high-k gate dielectrics and metal electrodes necessary. However, there are still a lot of problems with high-k transistors such as Fermi-level pinning (FLP), which affects flatband voltage ?Vfb?and threshold voltages (Vth) directly. This book summarizes three FLP mechanisms in gate stacks with high-k dielectrics and metal electrodes? a dipole formation through (1) the mechanism of oxygen vacancy formation in a high-k dielectric...

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Издательство: Книга по требованию
Дата выхода: июль 2011
ISBN: 978-3-6391-5068-1
Объём: 124 страниц
Масса: 209 г
Размеры(высота, ширина, толщина), см: 23 x 16 x 1

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