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Germanium Surface Preparation Methods. Germanium Surface Cleaning and Preparation Methods for Semiconductor Applications

Код 919881

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Аннотация к книге "Germanium Surface Preparation Methods. Germanium Surface Cleaning and Preparation Methods for Semiconductor Applications"

Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Contamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon surface have been extensively developed over the past few decades. Germanium surface...

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Издательство: Книга по требованию
Дата выхода: июль 2011
ISBN: 978-3-8364-8411-4
Объём: 104 страниц
Масса: 178 г
Размеры(высота, ширина, толщина), см: 23 x 16 x 1

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