книги Наука, техника, медицина Техника Транспорт Воздушный транспорт

High speed and Highly Accurate Tip-Scanning Atomic Force Microscope. Design Methodology, Control Strategy, and Performance Evaluation for the Tip-scanning Atomic Force Microscope for the Industrial Large Samples

Код 901788

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Аннотация к книге "High speed and Highly Accurate Tip-Scanning Atomic Force Microscope. Design Methodology, Control Strategy, and Performance Evaluation for the Tip-scanning Atomic Force Microscope for the Industrial Large Samples"

A novel high speed and highly accurate tip scanning AFM (TS-AFM) head which uses a flexure guided xy and z scanning system has been developed. Moreover, additional components including a coarse z-stage, an optical microscope with a motorized focus stage and structural frames are also developed to evaluate the feasibility for application for large samples for example, Liquid Crystal Displays and wafers. As experiments, performances of AFM components are evaluated in view point of the travel...

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Издательство: Книга по требованию
Дата выхода: июль 2011
ISBN: 978-3-6390-0270-6
Объём: 132 страниц
Масса: 221 г
Размеры(высота, ширина, толщина), см: 23 x 16 x 1

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