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Plasmonic Nanolithography. Towards next generation nano-manufacturing

Код 1454703

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Аннотация к книге "Plasmonic Nanolithography. Towards next generation nano-manufacturing"

As of now, the next-generation nano-manufacturing which can fulfill the cost, resolution, and throughput requirements for the fabrication of a wide range of nano-scale devices is still uncertain. Photolithography which served as the main manufacturing method in the past decades has the resolution limit, known as the diffraction limit. To reduce the features size, the employment of shorter wavelength light sources has come to the turning point where the cost of the system and the cycle time for...

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Издательство: Книга по требованию
Дата выхода: июль 2011
ISBN: 978-3-8383-2606-1
Объём: 128 страниц
Масса: 215 г
Размеры(высота, ширина, толщина), см: 23 x 16 x 1

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