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SILICON CARBIDE PRESSURE SENSORS AND INFRA-RED EMITTERS. Technology and Applications

Код 909145

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Аннотация к книге "SILICON CARBIDE PRESSURE SENSORS AND INFRA-RED EMITTERS. Technology and Applications"

A variety of harsh-environment and high demanding applications are gaining emphasis in Micro Electro- Mechanical System (MEMS) recently, such as locations of high temperatures, high oxidizing/corrosive environments, strong vibrations, and high radiation. Limitations of Si-based micro-systems for these applications are obvious. Package size and cost also become substantial when the devices have to be sufficiently isolated from the environmental harshness. Thus, an enabling platform material has...

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Издательство: Книга по требованию
Дата выхода: июль 2011
ISBN: 978-3-6391-2392-0
Объём: 188 страниц
Масса: 307 г
Размеры(высота, ширина, толщина), см: 23 x 16 x 1

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